Now showing items 1-3 of 3

    • Experimental characterization of capacitive micromachined ultrasonic transducers 

      Olcum, S.; Atalar, Abdullah; Köymen H.; Oguz, K.; Senlik, M.N. (2007)
      In this paper, capacitive micromachined ultrasonic transducers are fabricated using a sacrificial surface micromachining process. A testing procedure has been established in order to measure the absolute transmit and receive ...
    • Radiation impedance of an array of circular capacitive micromachined ultrasonic transducers 

      Senlik, M. N.; Olcum, S.; Köymen, H.; Atalar, Abdullah (IEEE, 2010)
      The radiation impedance of a capacitive micromachined ultrasonic transducer (cMUT) with a circular membrane is calculated analytically using its velocity profile for the frequencies up to its parallel resonance frequency ...
    • Wafer bonded capacitive micromachined underwater transducers 

      Olcum, S.; Oǧuz, K.; Şenlik, M.N.; Yamaner F.Y.; Bozkurt, A.; Atalar, Abdullah; Köymen H. (2009)
      In this work we have designed, fabricated and tested CMUTs as underwater transducers. Single CMUT membranes with three different radii and 380 microns of thickness are fabricated for the demonstration of an underwater CMUT ...