Browsing by Keywords "Thin film circuits"

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Atomic Layer Deposition for Vertically Integrated ZnO Thin Film Transistors: Toward 3D High Packing Density Thin Film Electronics

Sisman, Z.; Bolat, S.; Okyay, Ali Kemal (Wiley-VCH Verlag, 2017)

We report on the first demonstration of the atomic layer deposition (ALD) based three dimensional (3D) integrated ZnO thin film transistors (TFTs) on rigid substrates. Devices exhibit high on-off ratio (∼106) and high ...
Demonstration of flexible thin film transistors with GaN channels

Bolat, S.; Sisman, Z.; Okyay, Ali Kemal (American Institute of Physics Inc., 2016)

We report on the thin film transistors (TFTs) with Gallium Nitride (GaN) channels directly fabricated on flexible substrates. GaN thin films are grown by hollow cathode plasma assisted atomic layer deposition (HCPA-ALD) ...