Browsing by Keywords "Si CMOS"
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Defect reduction of Ge on Si by selective epitaxy and hydrogen annealing
(2008-10)We demonstrate a promising approach for the monolithic integration of Ge-based nanoelectronics and nanophotonics with S-ilicon: the selective deposition of Ge on Si by Multiple Hydrogen Annealing for Heteroepitaxy (MHAH). ... -
High performance n-MOSFETs with novel source/drain on selectively grown Ge on Si for monolithic integration
(IEEE, 2009)We demonstrate high performance Ge n-MOSFETs with novel raised source/drain fabricated on high quality single crystal Ge selectively grown heteroepitaxially on Si using Multiple Hydrogen Anealing for Heteroepitaxy(MHAH) ...
