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    • Wafer bonded capacitive micromachined underwater transducers 

      Olcum, Selim; Oǧuz, Kaan; Şenlik, Muhammed N.; Yamaner F. Y.; Bozkurt, A.; Atalar, Abdullah; Köymen, Hayrettin (IEEE, 2009-09)
      In this work we have designed, fabricated and tested CMUTs as underwater transducers. Single CMUT membranes with three different radii and 380 microns of thickness are fabricated for the demonstration of an underwater CMUT ...