Browsing by Keywords "Polycrystalline"
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Low temperature growth, characterization and applications of rf-sputtered SrTiO3 and BaSrTiO3 thin films
(Bilkent University, 2016-03)Among the several perovskite ferroelectric oxides, SrTiO3 (STO) and BaSrTiO3 (BST) thin lms have attracted signi cant attention due to their potential applications in oxide-based electronics. However, reliability and ... -
Preparation of Al 2O 3and AlN nanotubes by atomic layer deposition
(Cambridge University Press, 2012)Al 2O 3 and AlN nanotubes were fabricated by depositing conformal thin films via atomic layer deposition (ALD) on electrospun nylon 66 (PA66) nanofiber templates. Depositions were carried out at 200°C, using trimethylaluminum ... -
Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition
(2012)We report on the self-limiting growth and characterization of aluminum nitride (AlN) thin films. AlN films were deposited by plasma-enhanced atomic layer deposition on various substrates using trimethylaluminum (TMA) and ... -
TiO2 thin film transistor by atomic layer deposition
(SPIE, 2013)In this study, TiO2 films were deposited using thermal Atomic Layer Deposition (ALD) system. It is observed that asdeposited ALD TiO 2 films are amorphous and not suitable as TFT channel material. In order to use the film ...