Browsing by Keywords "Polycrystalline"

Low temperature growth, characterization and applications of rf-sputtered SrTiO3 and BaSrTiO3 thin films

Bayrak, Türkan (Bilkent University, 2016-03)

Among the several perovskite ferroelectric oxides, SrTiO3 (STO) and BaSrTiO3 (BST) thin lms have attracted signi cant attention due to their potential applications in oxide-based electronics. However, reliability and ...

Preparation of Al 2O 3and AlN nanotubes by atomic layer deposition

Ozgit-Akgun, Çagla; Kayacı, Fatma; Dönmez, İnci; Çağatay, Engin; Uyar, Tamer; Bıyıklı, Necmi (Cambridge University Press, 2012)

Al 2O 3 and AlN nanotubes were fabricated by depositing conformal thin films via atomic layer deposition (ALD) on electrospun nylon 66 (PA66) nanofiber templates. Depositions were carried out at 200°C, using trimethylaluminum ...

Self-limiting low-temperature growth of crystalline AlN thin films by plasma-enhanced atomic layer deposition

Ozgit, C.; Donmez I.; Alevli, M.; Bıyıklı, Necmi (2012)

We report on the self-limiting growth and characterization of aluminum nitride (AlN) thin films. AlN films were deposited by plasma-enhanced atomic layer deposition on various substrates using trimethylaluminum (TMA) and ...

TiO2 thin film transistor by atomic layer deposition

Okyay, Ali Kemal; Oruç, Feyza B.; Çimen, Furkan; Aygün, Levent E. (SPIE, 2013)

In this study, TiO2 films were deposited using thermal Atomic Layer Deposition (ALD) system. It is observed that asdeposited ALD TiO 2 films are amorphous and not suitable as TFT channel material. In order to use the film ...