Browsing by Keywords "Plasma enhanced chemical vapour deposition"

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Spectroscopic ellipsometric study of Ge nanocrystals embedded in SiO 2 using parametric models

Basa, P.; Petrik, P.; Fried, M.; Dâna, Aykutlu; Aydınlı, Atilla; Foss, S.; Finstad, T. G. (Wiley, 2008-05)

Ge-rich SiO2 layers on top of Si substrates were deposited using plasma enhanced chemical vapour deposition. Ge nanocrystals embedded in the SiO2 layers were formed by high temperature annealing. The samples were measured ...