Browsing by Keywords "Pecvd"
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Comparative investigation og hydrogen bonding in silicon based PECVD grown dielectrics for optical (Elsevier, 2004-06)Silicon oxide, silicon nitride and silicon oxynitride layers were grown by a PECVD technique. The resulting refractive indices of the layers varied between 1.47 and 1.93. The compositional properties of the layers were ...