Browsing by Keywords "Monolithic integration"
Now showing items 1-4 of 4
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High performance n-MOSFETs with novel source/drain on selectively grown Ge on Si for monolithic integration
(IEEE, 2009)We demonstrate high performance Ge n-MOSFETs with novel raised source/drain fabricated on high quality single crystal Ge selectively grown heteroepitaxially on Si using Multiple Hydrogen Anealing for Heteroepitaxy(MHAH) ... -
Intimate monolithic integration of chip-scale photonic circuits
(IEEE, 2005)In this paper, we introduce a robust monolithic integration technique for fabricating photonic integrated circuits comprising optoelectronic devices (e.g., surface-illuminated photodetectors, waveguide quantum-well modulators, ... -
Lateral overgrowth of germanium for monolithic integration of germanium-on-insulator on silicon
(Elsevier, 2015)A technique to locally grow germanium-on-insulator (GOI) structure on silicon (Si) platform is studied. On (001) Si wafer, silicon dioxide (SiO2) is thermally grown and patterned to define growth window for germanium (Ge). ... -
Silicon-Germanium multi-quantum well photodetectors in the near infrared
(Optical Society of American (OSA), 2012)Single crystal Silicon-Germanium multi-quantum well layers were epitaxially grown on silicon substrates. Very high quality films were achieved with high level of control utilizing recently developed MHAH epitaxial technique. ...