Browsing by Keywords "Metal oxide semiconductor"

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    • Electrical characteristics of β-Ga2O3 thin films grown by PEALD 

      Altuntas, H.; Donmez, I.; Ozgit Akgun, C.; Bıyıklı, Necmi (Elsevier, 2014)
      In this work, 7.5 nm Ga2O3 dielectric thin films have been deposited on p-type (1 1 1) silicon wafer using plasma enhanced atomic layer deposition (PEALD) technique. After the deposition, Ga2O 3 thin films were annealed ...

    • Self-assembled peptide nanofiber templated ALD growth of TiO2 and ZnO semiconductor nanonetworks 

      Garifullin, R.; Eren, H.; Ulusoy, T. G.; Okyay, Ali Kemal; Bıyıklı, Necmi; Güler, Mustafa O. (Wiley - V C H Verlag GmbH & Co. KGaA, 2016)
      Here peptide amphiphile (PA) nanofiber network is exploited as a three‐dimensional soft template to construct anatase TiO2 and wurtzite ZnO nanonetworks. Atomic layer deposition (ALD) technique is used to coat the organic ...