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    • Low temperature atomic layer deposited ZnO photo thin film transistors 

      Oruc, F. B.; Aygun, L. E.; Donmez, I.; Biyikli, N.; Okyay, A., K.; Yu, H. Y. (AVS Science and Technology Society, 2014)
      ZnO thin film transistors (TFTs) are fabricated on Si substrates using atomic layer deposition technique. The growth temperature of ZnO channel layers are selected as 80, 100, 120, 130, and 250°C. Material characteristics ...