Browsing by Keywords "MEMS"
Now showing items 1-20 of 20
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Airborne cmut cell design
(Bilkent University, 2014)All transducers used in airborne ultrasonic applications, including capacitive micromachined ultrasonic transducers (CMUTs), incorporate loss mechanisms to have reasonably wide frequency bandwidth. However, CMUTs can yield ... -
An analtical model for vibration analysis of disk resonator gyroscopes
(Institute of Electrical and Electronics Engineers, 2022-06-08)Disk resonator gyroscopes (DRGs) utilize the circular symmetry of a set of concentric rings to realize high-performance MEMS gyroscopes. We set forth an analytical method to calculate the mode shapes of the rings and then ... -
ANN-based estimation of MEMS diaphragm response: An application for three leaf clover diaphragm based Fabry-Perot interferometer
(Elsevier BV, 2022-06-23)In this study, an artificial neural network (ANN) based model is developed for MEMS diaphragm analysis, which does not require difficult and time-consuming FEM processes. ANN-based estimator is generated for static pressure ... -
Batch-compatible micromanufacturing of a CMUT array for optoacoustic imaging of tissue-like phantoms
(Bilkent University, 2021-08)Photoacoustic imaging (PAI), also named optoacoustic imaging, is a technol-ogy for medical imaging that relies on contrast data due to optical stimulation. Capacitive micromachined ultrasound transducers (CMUTs) are ... -
Deep collapse mode capacitive micromachined ultrasonic transducers
(Bilkent University, 2010)Capacitive micromachined ultrasonic transducers (CMUTs) are suspended microelectromechanical membrane structures with a moving top electrode and a rigid substrate electrode. The membrane is actuated by electrical signals ... -
Design of a high-resolution microfluidic microwave MEMS phase shifter
(Wiley, 2011)In this article, a novel microwave microelectromechanical phase shifter based on a microfluidic design is proposed and demonstrated. The design principles, the fabrication process, and experimental results (S-parameters ... -
Design, fabrication and operation of a very high intensity CMUT transmit array for beam steering applications
(Bilkent University, 2020-12)Several studies have reported airborne ultrasound transmission systems focused on achieving beamforming. However, beam steering and beamforming for capacitive micromachined ultrasonic transducers (CMUTs) at high intensity ... -
Designing, fabrication and post- fabrication characterization of half-frequency driven 16 x 16 waterborne transmit CMUT array
(Bilkent University, 2021-02)Capacitive Micromachined Ultrasonic Transducers (CMUT) are micro-scaled electromechanical devices which are used to either transmit or receive pressure signals and applicable for various purposes such as ultrasonic sensor, ... -
Electrically unbiased and half frequency driven waterborne 16×16-element 2-D phased array CMUT
(Bilkent University, 2019-08)Capacitive micromachined ultrasonic transducers (CMUT) are typically used as arrays consisting of separate cells or interconnected sub arrays, and these cells have several operation modes. Design procedure and ... -
Ferroelectric based microgyroscope for inertial measurement unit: Modeling and simulation
(IEEE, 2012)This paper present the design and modeling of the micro-electromechanical systems (MEMS) on the ternary ferroelectric compounds (PZT and Ba xSr 1-xTiO 3) based by using finite element model (FEM) simulation. © 2012 IEEE. -
In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon
(Nature Publishing Group, 2017)Silicon is an excellent material for microelectronics and integrated photonics 1-3, with untapped potential for mid-infrared optics 4 . Despite broad recognition of the importance of the third dimension 5,6, current ... -
Low-voltage small-size double-arm MEMS actuator
(2009)The fabrication and characterisation of a double-arm cantilever-type metallic DC-contact MEMS actuator with low pull-down voltage are reported. Bi-layer TiW cantilevers with an internal stress gradient were fabricated using ... -
Lumped element modeling of circular CMUT in collopsed mode
(Bilkent University, 2014)Capacitive micromachined ultrasonic transducer is a microelectromechanical device, which serves as an acoustic signal source or sensor, in a variety of applications including medical ultrasound imaging, ultrasound therapy, ... -
Mic-in-CMOS: CMUT as a sealed-gap capacitive microphone
(IEEE, 2020)The design and production of a CMOS compatible, watertight and ingress-proof CMUT (capacitive micromachined ultrasonic transducer) microphone, mic-in-CMOS, with vacuum-gap is described. We present an analytical ... -
Microcantilever based disposable viscosity sensor for serum and blood plasma measurements
(2013)This paper proposes a novel method for measuring blood plasma and serum viscosity with a microcantilever-based MEMS sensor. MEMS cantilevers are made of electroplated nickel and actuated remotely with magnetic field using ... -
Modeling and simulation of the ferroelectric based micro gyroscope: FEM analysis
(Taylor and Francis, 2013-09-23)This paper presents the design and modeling of micro-electromechanical systems (MEMS) on the ternary ferroelectric compounds (PZT) based by using finite element model (FEM) simulation. The conceptual framework establishes ... -
Multiple electrically tunable parametric resonances in a capacitively coupled electromechanical resonator for broadband energy harvesting
(Institute of Physics Publishing Ltd., 2021-03-12)Parametric excitation (PE) has widely been employed as a method of mechanical pre-amplification in nonlinear vibration energy harvesting systems. However, despite their advantages, most current PE systems are limited to ... -
Nanoelectromechanical switches for reconfigurable antennas
(2010)We report on the full-wave analyses of a frequency reconfigurable antenna integrated with metallic nanoelectromechanical system (NEMS) switches (length = 3 μm, width = 60 nm). The NEMS switch used in this work has the same ... -
Nanomechanical motion transducers for miniaturized mechanical systems
(MDPI AG, 2017)Reliable operation of a miniaturized mechanical system requires that nanomechanical motion be transduced into electrical signals (and vice versa) with high fidelity and in a robust manner. Progress in transducer technologies ... -
Nested metamaterials for wireless strain sensing
(IEEE, 2009-12-28)We designed, fabricated, and characterized metamaterial-based RF-microelectromechanical system (RF-MEMS) strain sensors that incorporate multiple split ring resonators (SRRs) in a compact nested architecture to measure ...
