Now showing items 1-14 of 14

    • Airborne cmut cell design 

      Yılmaz, Aslı (Bilkent University, 2014)
      All transducers used in airborne ultrasonic applications, including capacitive micromachined ultrasonic transducers (CMUTs), incorporate loss mechanisms to have reasonably wide frequency bandwidth. However, CMUTs can yield ...
    • Deep collapse mode capacitive micromachined ultrasonic transducers 

      Olçum, Selim (Bilkent University, 2010)
      Capacitive micromachined ultrasonic transducers (CMUTs) are suspended microelectromechanical membrane structures with a moving top electrode and a rigid substrate electrode. The membrane is actuated by electrical signals ...
    • Design of a high-resolution microfluidic microwave MEMS phase shifter 

      Ozbey, B.; Ozturk, S.; Aktas, O. (Wiley, 2011)
      In this article, a novel microwave microelectromechanical phase shifter based on a microfluidic design is proposed and demonstrated. The design principles, the fabrication process, and experimental results (S-parameters ...
    • Electrically unbiased and half frequency driven waterborne 16×16-element 2-D phased array CMUT 

      Enhoş, Kerem (Bilkent University, 2019-09)
      Capacitive micromachined ultrasonic transducers (CMUT) are typically used as arrays consisting of separate cells or interconnected sub arrays, and these cells have several operation modes. Design procedure and ...
    • Ferroelectric based microgyroscope for inertial measurement unit: Modeling and simulation 

      Ozer, Z.; Mamedov, A.M.; Ozbay, E. (2012)
      This paper present the design and modeling of the micro-electromechanical systems (MEMS) on the ternary ferroelectric compounds (PZT and Ba xSr 1-xTiO 3) based by using finite element model (FEM) simulation. © 2012 IEEE.
    • In-chip microstructures and photonic devices fabricated by nonlinear laser lithography deep inside silicon 

      Tokel, O.; Turnalı, A.; Makey, G.; Elahi, P.; Çolakoǧlu, T.; Ergeçen E.; Yavuz, Ö.; Hübner R.; Borra, M. Z.; Pavlov, I.; Bek, A.; Turan, R.; Kesim, D. K.; Tozburun, S.; Ilday, S.; Ilday, F. Ö. (Nature Publishing Group, 2017)
      Silicon is an excellent material for microelectronics and integrated photonics 1-3, with untapped potential for mid-infrared optics 4 . Despite broad recognition of the importance of the third dimension 5,6, current ...
    • LoC sensor array platform for real-time coagulation measurements 

      Cakmak, O.; Kilinc, N.; Ermek, E.; Mostafazadeh, A.; Elbuken, C.; Yaralioglu, G. G.; Urey, H. (Institute of Electrical and Electronics Engineers, 2014)
      This paper reports a MEMS-based sensor array enabling multiple clot-time tests in one disposable microfluidic cartridge using plasma. The versatile LoC (Lab-on-Chip) platform technology is demonstrated here for real-time ...
    • Low-voltage small-size double-arm MEMS actuator 

      Biyikli, N.; Damgaci, Y.; Cetiner, B.A. (2009)
      The fabrication and characterisation of a double-arm cantilever-type metallic DC-contact MEMS actuator with low pull-down voltage are reported. Bi-layer TiW cantilevers with an internal stress gradient were fabricated using ...
    • Lumped element modeling of circular CMUT in collopsed mode 

      Aydoğdu, Elif (Bilkent University, 2014)
      Capacitive micromachined ultrasonic transducer is a microelectromechanical device, which serves as an acoustic signal source or sensor, in a variety of applications including medical ultrasound imaging, ultrasound therapy, ...
    • Microcantilever based disposable viscosity sensor for serum and blood plasma measurements 

      Cakmak O.; Elbuken, C.; Ermek, E.; Mostafazadeh, A.; Baris I.; Erdem Alaca, B.; Kavakli I.H.; Urey H. (2013)
      This paper proposes a novel method for measuring blood plasma and serum viscosity with a microcantilever-based MEMS sensor. MEMS cantilevers are made of electroplated nickel and actuated remotely with magnetic field using ...
    • Modeling and simulation of the ferroelectric based micro gyroscope: FEM analysis 

      Ozer, Z.; Mamedov, A.M.; Ozbay, E. (Taylor and Francis, 2013-09-23)
      This paper presents the design and modeling of micro-electromechanical systems (MEMS) on the ternary ferroelectric compounds (PZT) based by using finite element model (FEM) simulation. The conceptual framework establishes ...
    • Nanoelectromechanical switches for reconfigurable antennas 

      Cetiner, B.A.; Biyikli, N.; Yildirim, B.S.; Damgaci, Y. (2010)
      We report on the full-wave analyses of a frequency reconfigurable antenna integrated with metallic nanoelectromechanical system (NEMS) switches (length = 3 μm, width = 60 nm). The NEMS switch used in this work has the same ...
    • Nanomechanical motion transducers for miniaturized mechanical systems 

      Kouh, T.; Hanay, M. S.; Ekinci, K. L. (MDPI AG, 2017)
      Reliable operation of a miniaturized mechanical system requires that nanomechanical motion be transduced into electrical signals (and vice versa) with high fidelity and in a robust manner. Progress in transducer technologies ...
    • Nested metamaterials for wireless strain sensing 

      Melik, R.; Unal, E.; Perkgoz, N. K.; Santoni, B.; Kamstock, D.; Puttlitz, C.; Demir, H. V. (IEEE, 2009-12-28)
      We designed, fabricated, and characterized metamaterial-based RF-microelectromechanical system (RF-MEMS) strain sensors that incorporate multiple split ring resonators (SRRs) in a compact nested architecture to measure ...