Browsing by Keywords "Low-temperature"
Now showing items 1-1 of 1
-
Low - temperature self - limiting growth of III - nitride thin films by plasma - enhanced atomic layer deposition
(American Scientific Publishers, 2012)We report on the low-temperature self-limiting growth and characterization of III-Nitride thin films. AlN and GaN films were deposited by plasma-enhanced atomic layer deposition (PEALD) on various substrates using ...