Browsing by Keywords "Low-temperature"

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Low - temperature self - limiting growth of III - nitride thin films by plasma - enhanced atomic layer deposition

Bıyıklı, Necmi; Ozgit, C.; Donmez, I. (American Scientific Publishers, 2012)

We report on the low-temperature self-limiting growth and characterization of III-Nitride thin films. AlN and GaN films were deposited by plasma-enhanced atomic layer deposition (PEALD) on various substrates using ...