Browsing by Keywords "Low surface roughness"

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CO2 laser polishing of microfluidic channels fabricated by femtosecond laser assisted carving

Serhatlioglu, M.; Ortaç, B.; Elbuken, C.; Biyikli, N.; Solmaz, M. E. (Institute of Physics Publishing, 2016-10)

In this study, we investigate the effects of CO2 laser polishing on microscopic structures fabricated by femtosecond laser assisted carving (FLAC). FLAC is the peripheral laser irradiation of 2.5D structures suitable for ...
Low-temperature grown wurtzite InxGa1−xN thin films via hollow cathode plasma-assisted atomic layer deposition

Haider A.; Kizir S.; Ozgit Akgun, C.; Goldenberg, E.; Leghari, S. A.; Okyay, A., K.; Biyikli, N. (Royal Society of Chemistry, 2015-08)

Herein, we report on atomic layer deposition of ternary InxGa1−xN alloys with different indium contents using a remotely integrated hollow cathode plasma source. Depositions were carried out at 200 °C using organometallic ...