Browsing by Keywords "High packing density"

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Atomic Layer Deposition for Vertically Integrated ZnO Thin Film Transistors: Toward 3D High Packing Density Thin Film Electronics

Sisman, Z.; Bolat, S.; Okyay, Ali Kemal (Wiley-VCH Verlag, 2017)

We report on the first demonstration of the atomic layer deposition (ALD) based three dimensional (3D) integrated ZnO thin film transistors (TFTs) on rigid substrates. Devices exhibit high on-off ratio (∼106) and high ...