Browsing by Keywords "Electrothermal Actuation"
Now showing items 1-2 of 2
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Design, fabrication, and applications of multi-mode nanoelectromechanical systems
(Bilkent University, 2017-07)Miniaturization of systems allowed wide spread consumer use of microelectronics, integrated circuits and MEMS based sensors. Thanks to the advancement in microfabrication methods, it is possible to build structures with ... -
Mass and stiffness spectrometry of nanoparticles and bio-molecules by nanoelectromechanical systems
(Bilkent University, 2018-08)Mass spectrometry (MS) is a technique used frequently in mass measurements in order to identify mass of the molecules. Nanoelectromechanical systems are highly sensitive to adhered species, thus using NEMS devices, it ...
