Browsing by Keywords "Atomic layer deposited HfO2"

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Atomic layer deposited HfO2 based metal insulator semiconductor GaN ultraviolet photodetectors

Kumar, M.; Tekcan, B.; Okyay, Ali Kemal (Elsevier BV, 2014)

A report on GaN based metal insulator semiconductor (MIS) ultraviolet (UV) photodetectors (PDs) with atomic layer deposited (ALD) 5-nm-thick HfO2 insulating layer is presented. Very low dark current of 2.24 × 10-11 A and ...