Now showing items 1-20 of 21

    • Acoustic microscopy with mechanical scanning—A review 

      Quate, C. F.; Atalar, Abdullah; Wickramasinghe, H. K. (IEEE, 1979-08)
      Acoustic waves in liquids are known to have wavelengths comparable to that of visible light if the frequency is in the gigahertz range. The phenomena of Brillouin scattering in liquids is based on such waves. In helium ...
    • Acoustic microscopy: resolution of subcellular detail 

      Johnston, R. N.; Atalar, Abdullah; Heiserman, J.; Jipson, V.; Quate, C. F. (National Academy of Sciences, 1979-07)
      Recent advances now permit the use of scanning acoustic microscopy for the analysis of subcellular components. By sequential viewing of identified fixed cells with acoustic, light, and electron microscopy, we have established ...
    • Analysis and design of an interdigital cantilever as a displacement sensor 

      Yaralioglu, G. G.; Atalar, Abdullah; Manalis, S. R.; Quate, C. F. (A I P Publishing LLC, 1998-06-15)
      The interdigital (ID) cantilever with two sets of interleaving fingers is an alternative to the conventional cantilever used in the atomic force microscope (AFM). In this paper we present a detailed analysis of the ...
    • Automated parallel high-speed atomic force microscopy 

      Minne, S. C.; Yaralioglu, G.; Manalis, S. R.; Adams, J. D.; Zesch, J.; Atalar, Abdullah; Quate, C. F. (A I P Publishing LLC, 1998-05-04)
      An expandable system has been developed to operate multiple probes for the atomic force microscope in parallel at high speeds. The combined improvements from parallelism and enhanced tip speed in this system represent an ...
    • Centimeter scale atomic force microscope imaging and lithography 

      Minne, S. C.; Adams, J. D.; Yaralioglu, G.; Manalis, S. R.; Atalar, Abdullah; Quate, C. F. (A I P Publishing LLC, 1998-09-21)
      We present a 4 mm2 image taken with a parallel array of 10 cantilevers, an image spanning 6.4 mm taken with 32 cantilevers, and lithography over a 100 mm2 area using an array of 50 cantilevers. All of these results represent ...
    • Contact imaging in the atomic force microscope using a higher order flexural mode combined with a new sensor 

      Minne, S. C.; Manalis, S. R.; Atalar, Abdullah; Quate, C. F. (A I P Publishing LLC, 1996-01)
      Using an atomic force microscope (AFM) with a silicon cantilever partially covered with a layer of zinc oxide (ZnO), we have imaged in the constant force mode by employing the ZnO as both a sensor and actuator. The cantilever ...
    • Dual integrated actuators for extended range high speed atomic force microscopy 

      Sulchek, T.; Minne, S. C.; Adams, J. D.; Fletcher, D. A.; Atalar, Abdullah; Quate, C. F.; Adderton, D. M. (A I P Publishing LLC, 1999-09-13)
      A flexible system for increasing the throughput of the atomic force microscope without sacrificing imaging range is presented. The system is based on a nested feedback loop which controls a micromachined cantilever that ...
    • Fabrication of 100 nm pMOSFETS With Hybrid AFW / STM lithography 

      Soh, H. T.; Wilder, K.; Atalar, Abdullah; Quate, C. F. (IEEE, 1997-06)
      Scanning probe lithography (SPL) is an emerging area of research in which the scanning tunneling microscope (STM) or atomic force microscope (AFM) is used to pattern nanometer-scale features. Four factors will dictate ...
    • High throughput, high resolution scanning probe microscopy 

      Adams, J. D.; Minne, S. C.; Manalis, S. R.; Wilder, K.; Yaralioglu, G.; Atalar, Abdullah; Adderton, D.; Quate, C. F. (Technology Publishing Ltd., 1998)
    • High-speed tapping mode imaging with active Q control for atomic force microscopy 

      Sulchek, T.; Hsieh, R.; Adams, J. D.; Yaralioglu, G. G.; Minne, S. C.; Quate, C. F.; Cleveland, J. P.; Atalar, Abdullah; Adderton, D. M. (American Institute of Physics, 2000)
      The speed of tapping mode imaging with the atomic force microscope(AFM) has been increased by over an order of magnitude. The enhanced operation is achieved by (1) increasing the instrument’s mechanical bandwidth and (2) ...
    • High‐speed atomic force microscopy using an integrated actuator and optical lever detection 

      Manalis, S. R.; Minne, S. C.; Atalar, Abdullah; Quate, C. F. (A I P Publishing LLC, 1996-09)
      A new procedure for high‐speed imaging with the atomic force microscope that combines an integrated ZnO piezoelectric actuator with an optical lever sensor has yielded an imaging bandwidth of 33 kHz. This bandwidth is ...
    • Hybrid atomic force/scanning tunneling lithography 

      Wilder, K.; Soh, H. T.; Atalar, Abdullah; Quate, C. F. (American Vacuum Society, 1997)
      We present a new technique for performing lithography with scanning probes that has several advantages over standard methods. This hybrid lithography system combines the key features of the atomic force microscope (AFM) ...
    • Independent parallel lithography using the atomic force microscope 

      Minne, S. C.; Manalis, S. R.; Atalar, Abdullah; Quate, C. F. (A I P Publishing LLC, 1996-05)
      Independent parallel features have been lithographically patterned with a 2×1 array of individually controlled cantilevers using an atomic force microscope. Control of the individual cantilevers was achieved with an ...
    • Integration of through-wafer interconnects with a two-dimensional cantilever array 

      Chow, E. M.; Soh, H. T.; Lee, H. C.; Adams, J. D.; Minne, S. C.; Yaralioglu, G. G.; Atalar, Abdullah; Quate, C. F.; Kenny, T. W. (Elsevier, 2000-05-22)
      High-density through-wafer interconnects are incorporated in a two-dimensional (2D) micromachined cantilever array. The design addresses alignment and density issues associated with 2D arrays. Each cantilever has piezoresistive ...
    • Interdigital cantilevers for atomic force microscopy 

      Manalis, S. R.; Minne, S. C.; Atalar, Abdullah; Quate, C. F. (A I P Publishing LLC, 1996-10)
      We present a sensor for the atomic force microscope (AFM) where a silicon cantilever is micromachined into the shape of interdigitated fingers that form a diffraction grating. When detecting a force, alternating fingers ...
    • Nanometer-scale patterning and individual current-controlled lithography using multiple scanning probes 

      Wilder, K.; Soh, H. T.; Atalar, Abdullah; Quate, C. F. (A I P Publishing LLC, 1999-06)
      Scanning probe lithography (SPL) is capable of sub-30-nm-patterning resolution and nanometer-scale alignment registration, suggesting it might provide a solution to the semiconductor industry’s lithography challenges. ...
    • Parallel atomic force microscopy with optical interferometric detection 

      Sulchek, T.; Grow, R. J.; Yaralioglu, G. G.; Minne, S. C.; Quate, C. F.; Manalis, S. R.; Kiraz, A.; Aydine, A.; Atalar, Abdullah (American Institute of Physics, 2001-01-05)
      We have developed an atomic force microscope that uses interferometry for parallel readout of a cantilever array. Each cantilever contains a phase sensitive diffraction grating consisting of a reference and movable set of ...
    • Phase imaging in reflection with the acoustic microscope 

      Atalar, Abdullah; Quate, C. F.; Wickramasinghe, H. K. (A I P Publishing, 1978-01)
      When a polished surface of a single crystal is examined with a converging acoustic beam the reflected signal has a characteristic response that is dependent upon the elastic properties of the reflecting surface. This ...
    • Resonant harmonic response in tapping-mode atomic force microscopy 

      Sahin, O.; Quate, C. F.; Solgaard, O.; Atalar, Abdullah (American Physical Society, 2004)
      Higher harmonics in tapping-mode atomic force microscopy offers the potential for imaging and sensing material properties at the nanoscale. The signal level at a given harmonic of the fundamental mode can be enhanced if ...
    • Silicon micromachined ultrasonic immersion transducers 

      Soh, H. T.; Ladabaum, I.; Atalar, Abdullah; Quate, C. F.; Khuri-Yakub, B. T. (A I P Publishing LLC, 1996-12-09)
      Broadband transmission of ultrasound in water using capacitive, micromachined transducers is reported. Transmission experiments using the same pair of devices at 4, 6, and 8 MHz with a signal‐to‐noise ratio greater than ...