Browsing by Author "Deminskyi, Petro"
Now showing items 1-4 of 4
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Area-selective atomic layer deposition of noble metals: polymerized fluorocarbon layers as effective growth inhibitors
(AVS Science and Technology Society, 2021-01-29)The increasingly complex nanoscale three-dimensional and multilayered structures utilized in nanoelectronic, catalytic, and energy conversion/storage devices necessitate novel substrate-selective material deposition ... -
Compact 1.5-GHz intra-burst repetition rate Yb-doped all-PM-fiber laser system for ablation-cooled material removal
(OSA, 2017)Summary form only given. Femtosecond (fs) laser pulse sources have become increasingly popular in the last decade as a result of their practical features, such as insensitivity to environmental variations, versatile designs, ... -
Investigation of native oxide removing from HCPA ALD grown GaN thin films surface utilizing HF solutions
(IEEE, 2016)The paper consider oxygen contamination of HCPA ALD grown GaN films under an air conditioning and during different time duration. High resolution XPS analysis of HCPA ALD grown GaN films after diluted 1:10 HF(41 %) : H2O ... -
Slicing crystalline silicon wafer by deep subsurface laser processing and selective chemical etching
(Institute of Electrical and Electronics Engineers Inc., 2019)In this work, we demonstrate use of laser-induced silicon slicing (LASIS) technique to fabricate crystalline silicon (c-Si) slices [1]. In LASIS method, a nanosecond-pulsed fiber laser operating at 1.55 μm wavelength, ...
