Gnilitskyi, I.Pavlov, IhorRotundo, F.Orazi, L.İlday, SerimMartini, C.İlday, F. Ömer2020-01-272020-01-2720159781467374750http://hdl.handle.net/11693/52820Date of Conference: 21–25 June 2015Conference name:2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics ConferenceThe production of nanostructures on different materials attracts much attention in different fields of manufacturing as a result of increased availability, affordability and technical capability of laser-based methods [1,2]. However, some shortcomings such as relatively low speed of processing, problems with material control, and lack of uniformity and/or repeatability over large areas continue to limit their practical adaptation.EnglishConference Paper