Ozer, Z.Mamedov, Amirullah M.Özbay, Ekmel2016-02-082016-02-082012http://hdl.handle.net/11693/28147Date of Conference: 9-13 July 2012This paper present the design and modeling of the micro-electromechanical systems (MEMS) on the ternary ferroelectric compounds (PZT and Ba xSr 1-xTiO 3) based by using finite element model (FEM) simulation. © 2012 IEEE.EnglishFEMferroelectricsMEMSDesign and modelingFerroelectric compoundsFinite element modelsInertial measurement unitMicro-gyroscopeModeling and simulationPZTTiOComputer simulationFerroelectricityFinite element methodMEMSUnits of measurementFerroelectric materialsFerroelectric based microgyroscope for inertial measurement unit: Modeling and simulationConference Paper10.1109/ISAF.2012.6297779