GaN-based thin-film-transistor structures grown by low-temperature plasma-enhancedatomic layer deposition

Bozkurt-Oruc, F.Ozgit-Akgun, C.Donmez, İ.Bıyıklı, N.Okyay, Ali Kemal2019-07-092019-07-092012http://hdl.handle.net/11693/52152Date of Conference: 17-20 June 2012EnglishGaN-based thin-film-transistor structures grown by low-temperature plasma-enhancedatomic layer depositionConference Paper