Sahin, O.Yaralioglu, G.Grow, R.Zappe, S. F.Atalar, AbdullahQuate, C.Solgaard, O.2016-02-082016-02-0820040924-4247http://hdl.handle.net/11693/24228We present a micromachined scanning probe cantilever, in which a specific higher-order flexural mode is designed to be resonant at an exact integer multiple of the fundamental resonance frequency. We have fabricated such cantilevers by reducing the stiffness of the third order flexural mode relative to the fundamental mode, and we have demonstrated that these cantilevers enable sensing of non-linear mechanical interactions between the atomically sharp tip at the free end of the cantilever and a surface with unknown mechanical properties in tapping-mode atomic force microscopy. Images of surfaces with large topographical variations show that for such samples harmonic imaging has better resolution than standard tapping-mode imaging.EnglishAtomic force microscopeCantileverElastic propertiesTapping-modeElastic propertiesFlexural resonanceTapping modeVibration spectrumAtomic force microscopyCantilever beamsElasticityImaging techniquesNatural frequenciesStiffnessThin filmsMicromachiningArticle10.1016/j.sna.2003.11.031