Tokel, OnurTurnalı, AhmetPavlov, Ihorİlday, Fatih Ömer2018-04-122018-04-122016http://hdl.handle.net/11693/37758Date of Conference: 24-28 August 2015Conference Name: 11th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2015We have recently reported a direct laser writing method enabling buried structures deep inside silicon. Here we study the formation of these subsurface structures. We take advantage of Nonlinearity Engineering to understand this new phenomenon.EnglishBuried structureDirect laser writingPhysical modelSubsurface structuresConference Paper10.1109/CLEOPR.2015.7375985