Atomic layer deposition of functional III-Nitride thin films & nano-structures

Bıyıklı, N.Ozgit-Akgun, C.Dönmez, İ.Kayacı, F.Uyar, Tamer2019-07-092019-07-092012http://hdl.handle.net/11693/52157Date of Conference: 26-29 April 2012EnglishAtomic layer deposition of functional III-Nitride thin films & nano-structuresConference Paper