Sulchek, T.Grow, R. J.Yaralioglu, G. G.Minne, S. C.Quate, C. F.Manalis, S. R.Kiraz, A.Aydine, A.Atalar, Abdullah2015-07-282015-07-282001-01-050003-6951http://hdl.handle.net/11693/10957We have developed an atomic force microscope that uses interferometry for parallel readout of a cantilever array. Each cantilever contains a phase sensitive diffraction grating consisting of a reference and movable set of interdigitated fingers. As a force is applied to the tip, the movable set is displaced and the intensity of the diffracted orders is altered. The order intensity from each cantilever is measured with a custom array of siliconphotodiodes with integrated complementary metal–oxide–semiconductor amplifiers. We present images from five cantilevers acquired in the constant height mode that reveal surface features 2 nm in height. The interdigital method for cantilever array readout is scalable, provides angstrom resolution, and is potentially simpler to implement than other methods. © 2001 American Institute of PhysicsEnglishCantileversArraysArticle10.1063/1.1352697