The impact of increasing number of growth cycles on the properties of AIN thin films grown at low temperature by plasma enhanced atomic layer deposition

Alevli, M.Ozgit-Akgun, C.Bıyıklı, N.2019-07-092019-07-092012http://hdl.handle.net/11693/52153Date of Conference: 17-20 June 2012EnglishThe impact of increasing number of growth cycles on the properties of AIN thin films grown at low temperature by plasma enhanced atomic layer depositionConference Paper