Karademir, Ertuğrul2016-01-082016-01-082010http://hdl.handle.net/11693/16022Ankara : The Department of Physics and the Institute of Engineering and Sciences of Bilkent University, 2010.Includes bibliographical references leaves 47-52.Cantilever beams are the most important parts of standard scanning probe microscopy. In this work, an integrated optical approach to sense the deflection of a cantilever beam is suggested and realized. A grating coupler loaded on the upper surface of the cantilever beam couples the incident light to the chip, which is then conveyed through a taper structure to a waveguide to be detected by a photodiode. Deflections of the cantilever beam change the optical path and hence the total transmitted intensity. Finally an optical signal is produced and this signal is measured. Resonance peak of 27.2 Q factor is obtained, which could be further enhanced by proper vibration isolation and employment of vacuum environment.xi, 52 leaves, illustrations, graphsEnglishinfo:eu-repo/semantics/openAccessCantileverGratingDisplacement SensorIntegrated OpticsScanning Probe MicroscopyQH212.S33 K37 2010Scanning probe microscopy.Integrated optics.ThesisB122712