Oğuz, H. KağanOlcum, SelimSenlik, Muhammed N.Atalar, AbdullahKöymen, Hayrettin2016-02-082016-02-082009-09http://hdl.handle.net/11693/28633Date of Conference: 20-23 Sept. 2009Conference name: 2009 IEEE International Ultrasonics SymposiumA nonlinear equivalent circuit for immersed transmitting capacitive micromachined ultrasonic transducers (CMUTs) is presented. The velocity profile across the CMUT surface maintains the same form over a wide frequency range. This property and the profile are used to model both the electromechanical conversion and the mechanical section. The model parameters are calculated considering the root mean square of the velocity distribution on the membrane surface as the through variable. The new model is compared with the FEM simulation results. The new model predicts the CMUT performance very accurately. ©2009 IEEE.EnglishCmutHarmonic distortionNonlinear modelRoot mean square velocityVelocity profileCapacitive micromachined ultrasonic transducerElectromechanical conversionEquivalent circuit modelFEM simulationsMembrane surfaceModel parametersNew modelNon-linear modelNonlinear equivalent circuitRoot Mean SquareVelocity profilesWide frequency rangeComputer simulationFinite element methodMechanical propertiesUltrasonicsVelocityVelocity distributionUltrasonic transducersConference Paper10.1109/ULTSYM.2009.5441435