Şenlik, Muhammed N.Atalar, AbdullahKöymen, HayrettinOlcum, Selim2016-02-082016-02-082006-10http://hdl.handle.net/11693/27201Date of Conference: 2-6 Oct. 2006Conference name: 2006 IEEE Ultrasonics SymposiumIn this paper, we present equivalent circuit for immersed capacitive micromachined ultrasonic transducers (cMUT), based on an accurate parametric model. We also present an accurate approximation for the radiation impedance cMUT. We develop a design approach for immersed cMUTs using the equivalent circuit. We demonstrate that the equivalent circuit predicts the performance of a cMUT array element composed of many cells in parallel. We investigate the applicability of the equivalent circuit in designing cMUT array elements. © 2006 IEEE.EnglishArray elementsCapacitive micromachined ultrasonic transducerDesign approachesParametric modelsRadiation impedanceEquivalent circuitsUltrasonicsUltrasonic transducersConference Paper10.1109/ULTSYM.2006.493