Poyraz, M.Gorgulu, K.Sisman, Z.Tanrikulu, M. Y.Okyay, Ali Kemal2018-04-122018-04-1220170091-3286http://hdl.handle.net/11693/37076We propose an all-ZnO bilayer microbolometer, operating in the long-wave infrared regime that can be implemented by consecutive atomic layer deposition growth steps. Bilayer design of the bolometer provides very high absorption coefficients compared to the same thickness of a single ZnO layer. High absorptivity of the bilayer structure enables higher performance (lower noise equivalent temperature difference and time constant values) compared to single-layer structure. We observe these results computationally by conducting both optical and thermal simulations. © 2017 Society of Photo-Optical Instrumentation Engineers (SPIE).EnglishAtomic layer depositionMicrobolometersUncooled infrared imagingZinc oxideAtomic layer depositionAtomsBolometersDepositionInfrared imagingTemperature sensorsThermography (imaging)Absorption co-efficientBi-layer structureLong-wave infrared regimesMicro-bolometersSingle-layer structureThermal simulationsTime constantsInfrared radiationArticle10.1117/1.OE.56.3.037106