Şenlik, Muhammed N.Atalar, AbdullahOlçum, Selim2016-02-082016-02-082007-101051-0117http://hdl.handle.net/11693/27068Date of Conference: 28-31 Oct. 2007Conference name: 2007 IEEE Ultrasonics Symposium ProceedingsIn this paper, we present how a capacitive micromachined ultrasonic transducer (cMUT) couples to the immersion medium, based on an accurate parametric model. We show that the velocity of cMUT membrane can be written as a sum of an average velocity term and a residual term. We demonstrate that this residual term carries non-zero energy at the parallel resonance frequency by investigating the interaction between the cMUT cell and a liquid medium. We develop a model that is also applicable around the parallel resonance frequency. © 2007 IEEE.EnglishCell membranesElectroacoustic transducersFlow interactionsNatural frequenciesUltrasonic transducersUltrasonicsAverage velocityCapacitive micromachined ultrasonic transducerImmersion mediumLiquid mediumsParallel resonanceParametric modelingZero energyResonanceConference Paper10.1109/ULTSYM.2007.541