Caliskan, D.Butun, B.Ozcan, S.Özbay, Ekmel2015-07-282015-07-2820141094-4087http://hdl.handle.net/11693/12408We fabricated UVB filtered TiO2 MSM photodetectors by the localized surface plasmon resonance effect. A plasmonic filter structure was designed using FDTD simulations. Final filter structure was fabricated with Al nano-cylinders with a 70 nm radius 180 nm period on 360 nm SiO2 film. The spectral response of the TiO2 MSM photodetector was modified and the UVB response was reduced by approx. 60% with an LSPR structure, resulting in a peak responsivity shift of more than 40 nm. To our knowledge, this is the first published result for the spectral response modification of TiO2 photodetectors with LSPR technique. © 2014 Optical Society of America.EnglishPhotodetectorsSurface Plasmon ResonanceTitanium DioxideFdtd SimulationsFilter StructuresLocalized Surface Plasmon ResonanceMsm PhotodetectorNanocylindersPeak ResponsivityPlasmonic FiltersSpectral ResponsePhotonsArticle10.1364/OE.22.014096