Demiralp, BerkePisheh, Hadi SedaghatKüçükoğlu, BerkHatipoğlu, UtkuHanay, Mehmet Selim2022-02-082022-02-082021-08-06978-1-6654-4845-12167-0013http://hdl.handle.net/11693/77139Conference Name: 2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)Date of Conference: 20-24 June 2021Controlling the amount and direction of buckling at micro- and nano-scale efficiently opens up avenues for novel actuation and sensor applications. Earlier platforms that can achieve a full and non-thermal control of microscopic buckling operated only with a time resolution of 40 ms. Here, we have measured the buckling amount of a beam starting from unbuckled position and reaching to large post-buckling deformations by collecting secondary electrons under scanning electron microscope. Line mode is used for ultrafast measurements with 33kHz scan frequency, and a displacement noise floor of 40pm/√Hz was obtained. Moreover, by further reduction in the device dimensions, the buckling threshold voltage was reduced by a factor of three compared to similar platforms.EnglishNEMSBucklingPost-bucklingNanofabricationScanning electron microscope line modeConference Paper10.1109/Transducers50396.2021.9495591978-1-6654-1267-42167-0021