Ölçüm, SelimAtalar, AbdullahKöymen, HayrettinOğuz, KağanŞenlik, Muhammed N.2016-02-082016-02-0820071051-0117http://hdl.handle.net/11693/27017Date of Conference: 28-31 October 2007Conference Name: Ultrasonics Symposium, IEEE 2007In this paper, capacitive micromachined ultrasonic transducers are fabricated using a sacrificial surface micromachining process. A testing procedure has been established in order to measure the absolute transmit and receive sensitivity spectra of the fabricated devices. The experiments are performed in oil. Pulse-echo experiments are performed and the results are compared to the pitch-catch measurements using calibrated transducers.EnglishCapacitive micromachined ultrasonic transducerscMUTElectroacoustic transducersExperimentsFlow of fluidsMicromachiningOptical designTransducersUltrasonic equipmentUltrasonic measurementUltrasonic wavesUltrasonicsExperimental characterizationFabricated devicesPitch-catchPulse echoesSurface micromachining processesTesting proceduresUltrasonic transducersConference Paper10.1109/ULTSYM.2007.536