Bıyıklı, NecmiKimukin, I.Tut, T.Aytur, O.Özbay, Ekmel2016-02-082016-02-0820050013-5194http://hdl.handle.net/11693/24090Solar-blind metal-semiconductor-metal (MSM) photodiodes based on MOCVD-grown Al0.6Ga0.4N template have been fabricated and tested. AlGaN detector samples were fabricated using a microwave compatible fabrication process. Optical transmission, current-voltage, spectral responsivity, and temporal pulse response measurements were carried out. The fabricated devices had very low leakage current and displayed true solar-blind response with ∼255 nm cutoff wavelength.EnglishMicrowavesArticle10.1049/el:200480281350-911X