Kıyat, İsaKocabaş, CoşkunAydınlı, Atilla2016-02-082016-02-0820031092-8081http://hdl.handle.net/11693/27479Date of Conference: 27-28 October 2003Conference Name: 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2003Analysis of a novel pressure sensor based on a SOI asymmetric vertical coupler is presented. The integrated optical component is a coupler composed of a single mode low index waveguide and a thin silicon slab.EnglishComputer simulationFinite element methodIntegrated optoelectronicsOptical waveguidesPressure measurementRefractive indexSilicon on insulator technologySingle mode fibersTwo dimensionalBeam propagation methodIntegrated vertical couplerSingle mode waveguideOptical sensorsPressure sensing using micromachined asymmetric integrated vertical couplerConference Paper10.1109/LEOS.2003.1252900