Aydınlı, AtillaKıyat, İsaKocabaş, Coşkun2016-02-082016-02-0820031092-8081http://hdl.handle.net/11693/27478Date of Conference: 27-28 October 2003Conference Name: 16th Annual Meeting of the IEEE Lasers and Electro-Optics Society, LEOS 2003A novel displacement sensor for scanning force microscoples using an integrated optical micro-ring resonator is described. Device operates by monitoring the changes in transmission spectrum of micro-ring resonator. This design provides sensitivities about ∼10-4 Å-1.EnglishComputer simulationFinite element methodIntegrated optoelectronicsMicroscopic examinationOptical designOptical resonatorsOptical waveguidesPhotoelasticityRefractive indexStrain measurementThree dimensionalMicro-ring resonatorOptical displacement sensorScanning force microscopySoftware Package ANSYSOptical sensorsConference Paper10.1109/LEOS.2003.1252901