Olcum, SelimKarademir, ErtuğrulTaş. VahdettinAkça, İmranKocabaş, AşkınAtalar, AbdullahAydınlı, Aydınlı2016-02-082016-02-082009-06http://hdl.handle.net/11693/28679Date of Conference: 14-19 June 2009Conference name: CLEO/Europe - EQEC 2009 - European Conference on Lasers and Electro-Optics and the European Quantum Electronics ConferenceIn this paper, we have fabricated an optical cantilever with an integrated grating coupler. We have used an inexpensive and repeatable method for integrating the grating to the silicon cantilever with a microfabrication compatible process. The sensitivity of the method can be further increased by integrating the detection circuitry onto the cantilever substrate. We believe that this is a promising method for sensing applications which provide a simple yet sensitive measurement technique using microcantilevers.EnglishIntegrated opticsGratingsOptical couplingOptical waveguidesOptical sensorsHolographyAtom opticsAtomic force microscopyOptical microscopyHolographic optical componentsConference Paper10.1109/CLEOE-EQEC.2009.5192614