Melik, R.Unal, E.Perkgoz, N.K.Puttlitz, C.Demir, Hilmi Volkan2016-02-082016-02-08200914248220http://hdl.handle.net/11693/22555We present circular architecture bioimplant strain sensors that facilitate a strong resonance frequency shift with mechanical deformation. The clinical application area of these sensors is for in vivo assessment of bone fractures. Using a rectangular geometry, we obtain a resonance shift of 330 MHz for a single device and 170 MHz for its triplet configuration (with three side-by-side resonators on chip) under an applied load of 3,920 N. Using the same device parameters with a circular isotropic architecture, we achieve a resonance frequency shift of 500 MHz for the single device and 260 MHz for its triplet configuration, demonstrating substantially increased sensitivity. © 2009 by the authors.EnglishBiomems sensorsCircular architectureFrequency shiftQ-factorResonatorsRFICSensitivityBio-mems sensorFrequency shiftQ-factorsRFICSensitivityFrequency shift keyingNatural frequenciesResonatorsSensorsArticle10.3390/s91209444