Tilkioğlu, Bilge T.Bolat, SamiTanrıkulu, Mahmud YusufOkyay, Ali Kemal2018-04-122018-04-1220170734-2101http://hdl.handle.net/11693/37077The authors demonstrate the digital alloying of ZnO and TiO2 via atomic layer deposition method to be utilized as the active material of uncooled microbolometers. Depositions are carried out at 200 °C. Crystallinity of the material is shown to be degraded with the increase of the Ti content in the grown film. A maximum temperature coefficient of resistance (TCR) of −5.96%/K is obtained with the films containing 12.2 at. % Ti, and the obtained TCR value is shown to be temperature insensitive in the 15-22 °C, thereby allowing a wide range of operation temperatures for the low cost microbolometers. © 2017 American Vacuum Society.EnglishAtomic layer depositionBolometersTemperatureTemperature sensorsThermistorsThin filmsTitanium dioxideZinc oxideCrystallinitiesDigital alloyingMaximum temperatureMicro-bolometersOperation temperatureTemperature-insensitiveThin film thermistorUncooled microbolometersDepositionArticle10.1116/1.4976513