Gökkavas, MutluBütün, SerkanCaban, P.Strupinski, W.Özbay, Ekmel2016-02-082016-02-0820091092-8081http://hdl.handle.net/11693/28605Date of Conference: 4-8 October 2009Conference Name: LEOS’09 22nd Annual Meeting of IEEE Photonics Society, LEOS 2009Quadruple back-illuminated ultraviolet metal-semiconductor-metal photodetectors with four different spectral responsivity bands were demonstrated. The average of the full-width at half-maximum (FWHM) of the quantum efficiency peaks was 9.98 nm.EnglishAlGaNBack-illuminatedMetal semiconductor metal photodetectorSpectral responsivityHeterojunctionsOptoelectronic devicesPhotodetectorsConference Paper10.1109/LEOS.2009.5343098