Ozbey, B.Ozturk, S.Aktas, O.2016-02-082016-02-0820110895-2477http://hdl.handle.net/11693/21835In this article, a novel microwave microelectromechanical phase shifter based on a microfluidic design is proposed and demonstrated. The design principles, the fabrication process, and experimental results (S-parameters and phase shift plots) are presented. The proposed system has a high bandwidth, high-power handling capacity, and a high-resolution along with a small settling time.EnglishMEMSMicrofluidicsPhase shifterArticle10.1002/mop.26127