Serhatlioglu, MuratElbuken, ÇağlarOrtac, BülendSolmaz, Mehmet E.2018-04-122018-04-12201797815106055721605-7422http://hdl.handle.net/11693/37566Date of Conference: 28–29 January 2017Miniaturized optofluidic platforms play an important role in bio-analysis, detection and diagnostic applications. The advantages of such miniaturized devices are extremely low sample requirement, low cost development and rapid analysis capabilities. Fused silica is advantageous for optofluidic systems due to properties such as being chemically inert, mechanically stable, and optically transparent to a wide spectrum of light. As a three dimensional manufacturing method, femtosecond laser scanning followed by chemical etching shows great potential to fabricate glass based optofluidic chips. In this study, we demonstrate fabrication of all-fiber based, optofluidic flow cytometer in fused silica glass by femtosecond laser machining. 3D particle focusing was achieved through a straightforward planar chip design with two separately fabricated fused silica glass slides thermally bonded together. Bioparticles in a fluid stream encounter with optical interrogation region specifically designed to allocate 405nm single mode fiber laser source and two multi-mode collection fibers for forward scattering (FSC) and side scattering (SSC) signals detection. Detected signal data collected with oscilloscope and post processed with MATLAB script file. We were able to count number of events over 4000events/sec, and achieve size distribution for 5.95μm monodisperse polystyrene beads using FSC and SSC signals. Our platform shows promise for optical and fluidic miniaturization of flow cytometry systems. © 2017 SPIE.EnglishAll-fiberFemtosecond laserFlow cytometryFused silicaHydrodynamic focusingMachiningMicrofluidicsOptofluidicBioassayBiochipsDiagnosisEmission spectroscopyFabricationFiber lasersFibersFlow cytometryForward scatteringGlassMachiningMicroarraysMicrofluidicsMiniature instrumentsOptical fiber fabricationOptical fibersSignal detectionSilicaSingle mode fibersTextile fibersUltrashort pulsesAll fiberDetection and diagnosticsFemtosecond laser machiningFlow cytometry systemsHydrodynamic focusingMonodisperse polystyreneOptofluidicThree-dimensional manufacturingFused silicaConference Paper10.1117/12.2252092