Ayas S.Bakan, G.Dana, A.2016-02-082016-02-0820151094-4087http://hdl.handle.net/11693/22014Multispectral metamaterial absorbers based on metal-insulatormetal nano-square patch resonators are studied here. For a geometry consisting of perfectly nano-square patches and vertical sidewalls, double resonances in the visible regime are observed due to simultaneous excitation of electric and magnetic plasmon modes. Although slightly modifying the sizes of the square patches makes the resonance wavelengths simply shift, rounding corners of the square patches results in emergence of a third resonance due to excitation of the circular cavity modes. Sidewall angle of the patches are also observed to affect the absorption spectra significantly. Peak absorption values for the triple resonance structures are strongly affected as the sidewall angle varies from 90 to 50 degrees. Rounded corners and slanted sidewalls are typical imperfections for lithographically fabricated metamaterial structures. The presented results suggest that imperfections caused during fabrication of the top nanostructures must be taken into account when designing metamaterial absorbers. Furthermore, it is shown that these fabrication imperfections can be exploited for improving resonance properties and bandwidths of metamaterials for various potential applications such as solar energy harvesting, thermal emitters, surface enhanced spectroscopies and photodetection. © 2015 Optical Society of America.EnglishElectric excitationEnergy harvestingFabricationPlasmonsResonanceSolar energyDouble resonanceFabrication imperfectionsMagnetic plasmonsMetamaterial absorbersMetamaterial structuresPlasmonic metamaterialsResonance wavelengthsSurface enhanced spectroscopyMetamaterialsArticle10.1364/OE.23.011763