Minne, S. C.Manalis, S. R.Atalar, AbdullahQuate, C. F.2015-07-282015-07-281996-052166-2746http://hdl.handle.net/11693/10829Independent parallel features have been lithographically patterned with a 2×1 array of individually controlled cantilevers using an atomic force microscope. Control of the individual cantilevers was achieved with an integrated piezoelectric actuator in feedback with a piezoresistive sensor. Patterns were formed on 〈100〉 single crystal silicon by using a computer controlled tip voltage to locally enhance the oxidation of the silicon. Using the piezoresistor directly as a force sensor, parallel images can be simultaneously acquired in the constant force mode. A discussion of electrostatic forces due to applied tip voltages, hysteresis characteristics of the actuator, and the cantilever system is also presented.EnglishChemical elementsPiezoelectricityPiezoresistanceSensorsElectrostaticsArticle10.1116/1.5887532166-2754