Oral, AhmetKaval, MuratDede, MünirMasuda, H.Okamoto, A.Shibasaki, I.Sandhu, A.2016-02-082016-02-0820020018-9464http://hdl.handle.net/11693/27568Date of Conference: 28 April-2 May 2002Conference Name: 2002 International Magnetics Conference, INTERMAG 2002The room-temperature scanning Hall probe microscopy (RT-SHPM) imaging of garnet films using high-performance InSb sensors was discussed. The high-performance InSb micro-Hall sensors were fabricated by optical lithography. It was found that the room-temperature noise figure of the InSb sensors was 6-10 mG/√Hz, which was an order of magnitude better than GaAs-AlGaAs two-dimensional electron gas sensors.EnglishHall effectScanning Hall probe microscopyCrystalline materialsElectron gasGarnetsImaging techniquesIndium compoundsPhotolithographySensorsMagnetic filmsConference Paper10.1109/TMAG.2002.803607