Template-based synthesis of AlN hollow nanofibers via plasma-enhanced atomic layer deposition

Ozgit-Akgun, C.Kayacı, F.Dönmez, İ.Uyar, T.Bıyıklı, N.2019-07-092019-07-092012http://hdl.handle.net/11693/52177Date of Conference: 18-21 June 2012EnglishTemplate-based synthesis of AlN hollow nanofibers via plasma-enhanced atomic layer depositionConference Paper