Laser-slicing of silicon with 3D nonlinear laser lithography

Tokel, OnurTurnalı, AhmetÇolakoğlu, T.İlday, SerimBorra, M. Z.Pavlov, IhorBek, A.Turan, R.İlday, Fatih Ömer2018-04-122018-04-122017http://hdl.handle.net/11693/37672Date of Conference: 25-29 June 2017Conference Name: European Conference on Lasers and Electro-Optics and the European Quantum Electronics Conference, CLEO/Europe - EQEC 2017Recently, we have showed a direct laser writing method that exploits nonlinear interactions to form subsurface modifications in silicon. Here, we use the technique to demonstrate laser-slicing of silicon and its applications.EnglishSiliconThree-dimensional displaysLithographyLaser theoryPhysicsLaser-slicing of silicon with 3D nonlinear laser lithographyConference Paper10.1109/CLEOE-EQEC.2017.8087259