Kouh, T.Hanay, M. S.Ekinci, K. L.2018-04-122018-04-122017http://hdl.handle.net/11693/38333Reliable operation of a miniaturized mechanical system requires that nanomechanical motion be transduced into electrical signals (and vice versa) with high fidelity and in a robust manner. Progress in transducer technologies is expected to impact numerous emerging and future applications of micro- and, especially, nanoelectromechanical systems (MEMS and NEMS); furthermore, high-precision measurements of nanomechanical motion are broadly used to study fundamental phenomena in physics and biology. Therefore, development of nanomechanical motion transducers with high sensitivity and bandwidth has been a central research thrust in the fields of MEMS and NEMS. Here, we will review recent progress in this rapidly-advancing area.EnglishActuatorElectromechanicsMicroelectromechanical systems (MEMS)Nanoelectromechanical systems (NEMS)NanomechanicsOptomechanicsOscillatorResonatorSensorTransducerActuatorsElectric drivesElectromechanical devicesMechanicsMEMSNanomechanicsNEMSOscillators (electronic)ResonatorsSensorsElectro-mechanicsFuture applicationsHigh-precision measurementMicro electromechanical system (MEMS)Nano electromechanical systemsNanomechanical motionOpto-mechanicsReliable operationTransducersReview10.3390/mi80401082072-666X