Sandhu, A.Masuda, H.Oral, A.Yamada, A.Konagai, M.2016-02-082016-02-0820020304-3991http://hdl.handle.net/11693/24661A room temperature scanning Hall probe microscope system utilizing GaAs/AlGaAs and bismuth micro-Hall probes was used for magnetic imaging of ferromagnetic domain structures on the surfaces of crystalline thin film garnets and permanent magnets. The Bi micro-Hall probes had dimensions ranging between 0.25 and 2.8μm2 and were fabricated using a combination of optical lithography and focused ion beam milling. The use of bismuth was found to overcome surface depletion effects associated with semiconducting micro-Hall probes. Our experiments demonstrated that Bi is a practical choice of material for fabricating sub-micron sized Hall sensors.EnglishBismuthFerromagnetic domainsGaAsGarnetsHall sensorsNanotechnologyPermanent magneticsBismuthGarnetsIon beamsPermanent magnetsPhotolithographySemiconducting gallium arsenideThin filmsMicro-Hall probesMicroscopic examinationBismuthCrystallinFerromagnetic materialIonDepletionFilmImagingMagnetMicroscopyRoom temperatureSemiconductorSensorArticle10.1016/S0304-3991(02)00087-6